Publications Stefan Halama
29 recordsBooks and Editorships
1. | F. Fasching, S. Halama, S. Selberherr (ed.): "Technology CAD Systems"; Springer-Verlag, Wien - New York, 1993, ISBN: 978-3-7091-9317-4; 309 pages. https://doi.org/10.1007/978-3-7091-9315-0 | |
Publications in Scientific Journals
3. | S. Halama, F. Fasching, C. Fischer, H. Kosina, E. Leitner, P. Lindorfer, C. Pichler, H. Pimingstorfer, H. Puchner, G. Rieger, G. Schrom, T. Simlinger, M. Stiftinger, H. Stippel, E. Strasser, W. Tuppa, K. Wimmer, S. Selberherr: "The Viennese Integrated System for Technology CAD Applications"; Microelectronics Journal, 26 (1995), 137 - 158. https://doi.org/10.1016/0026-2692(95)98918-H | |
2. | S. Halama, C. Pichler, G. Rieger, G. Schrom, T. Simlinger, S. Selberherr: "VISTA - User Interface, Task Level, and Tool Integration"; IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 14 (1995), 10; 1208 - 1222. https://doi.org/10.1109/43.466337 | |
1. | S. Halama, S. Selberherr: "Future Aspects of Process and Device Simulation"; Electron Technology (invited), 26 (1993), 49 - 57. | |
Contributions to Books
1. | S. Selberherr, C. Fischer, S. Halama, C. Pichler, G. Rieger, G. Schrom, T. Simlinger: "Device Structures and Device Simulation Techniques"; in: "Low-Power HF Microelectronics", A.S. Machado (ed.); The Institution of Electrical Engineers, 1996, (invited), ISBN: 0-85296-874-4, 57 - 83. https://doi.org/10.1049/PBCS008E_ch2 | |
Talks and Poster Presentations (with Proceedings-Entry)
19. | G. Rieger, S. Halama, S. Selberherr: "A Graphical Editor for TCAD Purposes"; Poster: Conference on Geometric Design, Nashville; 1995-12-30; in: "Abstracts SIAM Conf. On Geometric Design", (1995), A17. | |
18. | G. Rieger, S. Halama, S. Selberherr: "A Programmable Tool for Interactive Wafer-State Level Data Processing"; Talk: International Conference on the Simulation of Semiconductor Devices and Processes (SISDEP), Erlangen; 1995-09-06 - 1995-09-08; in: "Proceedings SISDEP 95 Conference", (1995), ISBN: 3-211-82736-6; 58 - 61. https://doi.org/10.1007/978-3-7091-6619-2_13 | |
17. | S. Selberherr, C. Fischer, S. Halama, C. Pichler, G. Rieger, G. Schrom, T. Simlinger: "The IC Processes of the Future: Advances in Device Structures and Device Simulation Techniques"; Talk: Eschola da Sociedade Brasileira de Microeletronica (EBMICRO), Recife (invited); 1995-01-15 - 1995-01-20; in: "Proceedings IV EBMICRO", Vol. 1 (1995), 87 - 114. | |
16. | S. Halama, F. Fasching, C. Fischer, H. Kosina, E. Leitner, C. Pichler, H. Pimingstorfer, H. Puchner, G. Rieger, G. Schrom, T. Simlinger, M. Stiftinger, H. Stippel, E. Strasser, W. Tuppa, K. Wimmer, S. Selberherr: "The Viennese Integrated System for Technology CAD Applications"; Talk: Workshop on Technology CAD Systems, Wien (invited); 1993-09-06; in: "Proceedings Technology CAD Systems Workshop", (1993), ISBN: 3-211-82505-3; 197 - 236. https://doi.org/10.1007/978-3-7091-9315-0_10 | |
15. | H. Stippel, S. Halama, G. Hobler, K. Wimmer, S. Selberherr: "Adaptive Grid for Monte Carlo Simulation of Ion Implantation"; Talk: International Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits (NUPAD), Seattle; 1992-05-31 - 1992-06-01; in: "Proceedings NUPAD IV", (1992), ISBN: 0-7803-0516-7; 231 - 236. | |
14. | S. Halama, F. Fasching, H. Pimingstorfer, W. Tuppa, S. Selberherr: "Consistent User Interface and Task-Level Architecture of a TCAD System"; Poster: International Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits (NUPAD), Seattle; 1992-05-31 - 1992-06-01; in: "Proceedings NUPAD IV", (1992), ISBN: 0-7803-0516-7; 237 - 242. | |
13. | S. Halama, S. Selberherr: "Future Aspects of Process and Device Simulation"; Talk: Semiconductor Engineering and Technology Symposium (SET), Warschau (invited); 1992-10-12 - 1992-10-14; in: "Abstracts SET 92 Conference", (1992), ISBN: 83-01-11293-x; 83 - 85. | |
12. | H. Stippel, F. Fasching, C. Fischer, S. Halama, H. Pimingstorfer, W. Tuppa, K. Wimmer, S. Selberherr: "Implementation of a TCAD Framework"; Talk: European Simulation Multiconference (ESM), York; 1992-06-01 - 1992-06-03; in: "Proceedings European Simulation Multiconference", (1992), ISBN: 1-56555-013-7; 131 - 135. | |
11. | F. Fasching, C. Fischer, S. Halama, H. Pimingstorfer, H. Read, S. Selberherr, H. Stippel, W. Tuppa, P. Verhas, K. Wimmer: "A New Open Technology CAD System"; Talk: European Solid-State Device Research Conference (ESSDERC), Montreux; 1991-09-16 - 1991-09-19; in: "Proceedings of the European Solid-State Device Research Conference (ESSDERC)", (1991), ISBN: 0-444-89066-1; 217 - 220. https://doi.org/10.1016/0167-9317(91)90216-Z | |
10. | H. Pimingstorfer, S. Halama, S. Selberherr: "A TCAD Environment for Process and Device Engineering"; Talk: International Conference on VLSI and CAD (ICVC), Seoul; 1991-10-22 - 1991-10-25; in: "Proceedings International Conference on VLSI and CAD 91", (1991), 280 - 283. | |
9. | H. Pimingstorfer, S. Halama, S. Selberherr, K. Wimmer, P. Verhas: "A Technology CAD Shell"; Talk: International Conference on the Simulation of Semiconductor Devices and Processes (SISDEP), Zürich; 1991-09-12 - 1991-09-14; in: "Proceedings SISDEP 91", (1991), ISBN: 3-89191-476-8; 409 - 416. | |
8. | F. Fasching, C. Fischer, S. Halama, H. Pimingstorfer, H. Read, S. Selberherr, H. Stippel, P. Verhas, K. Wimmer: "An Integrated Technology CAD Environment"; Talk: VLSI Technology, Systems and Applications Symposium (VLSITSA), Taipeh; 1991-05-22 - 1991-05-24; in: "Proceedings VLSI Technology, Systems and Applications Symposium", (1991), ISBN: 0-7803-0036-x; 147 - 151. | |
7. | S. Halama, G. Hobler, K. Wimmer, S. Selberherr: "Eine neue Methode zur Simulation der Diffusion in allgemeinen Strukturen"; Talk: Seminar Grundlagen und Technologie elektronischer Bauelemente, Großarl; 1991-03-20 - 1991-03-23; in: "Tagungsbericht Seminar Grundlagen und Technologie elektronischer Bauelemente", (1991), 20 - 26. | |
6. | K. Wimmer, R. Bauer, S. Halama, G. Hobler, S. Selberherr: "Simulation nichtplanarer Herstellungsprozesse mit PROMIS"; Talk: Seminar Grundlagen und Technologie elektronischer Bauelemente, Großarl; 1991-03-20 - 1991-03-23; in: "Tagungsbericht Seminar Grundlagen und Technologie elektronischer Bauelemente", (1991), 10 - 19. | |
5. | S. Selberherr, C. Fischer, S. Halama, H. Pimingstorfer, H. Read, H. Stippel, P. Verhas, K. Wimmer: "The Viennese TCAD System"; Talk: VLSI Process and Device Modeling Workshop (VPAD), Oiso (invited); 1991-05-26 - 1991-05-27; in: "Proceedings VPAD Workshop", (1991), 32 - 35. | |
4. | K. Wimmer, R. Bauer, S. Halama, G. Hobler, S. Selberherr: "Transformation Methods for Nonplanar Process Simulation"; Talk: International Conference on the Simulation of Semiconductor Devices and Processes (SISDEP), Zürich; 1991-09-12 - 1991-09-14; in: "Proceedings SISDEP 91", (1991), ISBN: 3-89191-476-8; 131 - 138. | |
3. | S. Halama, K. Wimmer, G. Hobler, S. Selberherr: "Finite-Differenzen Dreiecksnetzgenerierung für die Prozess-Simulation mit PROMIS"; Talk: Workshop Numerische Simulation für Technologieentwicklung (NuTech), Garmisch-Partenkirchen; 1990-09-20 - 1990-09-21; in: "Proceedings NuTech", (1990), 3. | |
2. | K. Wimmer, R. Bauer, S. Halama, G. Hobler, S. Selberherr: "Prozess-Simulation in nichtplanaren Strukturen mit PROMIS"; Talk: Workshop Numerische Simulation für Technologieentwicklung (NuTech), Garmisch-Partenkirchen; 1990-09-20 - 1990-09-21; in: "Proceedings NuTech", (1990), 4. | |
1. | G. Hobler, S. Halama, K. Wimmer, S. Selberherr, H. Pötzl: "RTA-Simulations with the 2-D Process Simulator PROMIS"; Talk: International Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits (NUPAD), Honolulu; 1990-06-03 - 1990-06-04; in: "NUPAD III Techn. Digest", (1990), 13 - 14. | |
Doctor's Theses (authored and supervised)
1. | S. Halama: "The Viennese Integrated System for Technology CAD Applications"; Supervisor, Reviewer: S. Selberherr, D. Dietrich; Institut für Mikroelektronik, 1994; oral examination: 1994-05-27. | |
Diploma and Master Theses (authored and supervised)
1. | S. Halama: "Untersuchung der thermischen Oxidation von Silicium mit Hilfe molekulardynamischer Simulationsmethoden"; Supervisor: G. Hobler, S. Selberherr; Institut für Mikroelektronik, 1989. | |
Scientific Reports
3. | W. Bohmayr, S. Halama, C. Pichler, S. Selberherr, T. Simlinger, E. Strasser, W. Tuppa: "VISTA Status Report June 1994"; 1994; 25 pages. | |
2. | S. Halama, C. Pichler, G. Rieger, S. Selberherr, T. Simlinger, H. Stippel, E. Strasser: "VISTA Status Report December 1993"; 1993; 19 pages. | |
1. | F. Fasching, S. Halama, C. Pichler, H. Pimingstorfer, G. Rieger, G. Schrom, S. Selberherr, M. Stiftinger: "VISTA Status Report June 1993"; 1993; 20 pages. | |