Publications Stefan Halama
29 records
| 1. | F. Fasching, S. Halama, S. Selberherr: "Technology CAD Systems"; Springer-Verlag, Wien - New York, (1993), ISBN: 978-3-7091-9317-4, 309 page(s) doi:10.1007/978-3-7091-9315-0. BibTeX |
| 3. | S. Halama, F. Fasching, C. Fischer, H. Kosina, E. Leitner, P. Lindorfer, C. Pichler, H. Pimingstorfer, H. Puchner, G. Rieger, G. Schrom, T. Simlinger, M. Stiftinger, H. Stippel, E. Strasser, W. Tuppa, K. Wimmer, S. Selberherr: "The Viennese Integrated System for Technology CAD Applications"; Microelectronics Journal, 26, (1995), 137 - 158 doi:10.1016/0026-2692(95)98918-H. BibTeX |
| 2. | S. Halama, C. Pichler, G. Rieger, G. Schrom, T. Simlinger, S. Selberherr: "VISTA - User Interface, Task Level, and Tool Integration"; IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 14, (1995), 1208 - 1222 doi:10.1109/43.466337. BibTeX |
| 1. | S. Halama, S. Selberherr: "Future Aspects of Process and Device Simulation"; Electron Technology, 26, (invited) (1993), 49 - 57. BibTeX |
| 1. | S. Selberherr, C. Fischer, S. Halama, C. Pichler, G. Rieger, G. Schrom, T. Simlinger: "Device Structures and Device Simulation Techniques"; in "Low-Power HF Microelectronics", A.S. Machado (ed); The Institution of Electrical Engineers, (invited) 1996, ISBN: 0-85296-874-4, 57 - 83 doi:10.1049/PBCS008E_ch2. BibTeX |
| 19. | G. Rieger, S. Halama, S. Selberherr: "A Graphical Editor for TCAD Purposes"; Poster: Conference on Geometric Design, Nashville; 1995-12-30 in "Abstracts SIAM Conf. On Geometric Design", (1995), A17. BibTeX |
| 18. | G. Rieger, S. Halama, S. Selberherr: "A Programmable Tool for Interactive Wafer-State Level Data Processing"; Talk: International Conference on the Simulation of Semiconductor Devices and Processes (SISDEP), Erlangen; 1995-09-06 - 1995-09-08; in "Proceedings SISDEP 95 Conference", (1995), ISBN: 3-211-82736-6, 58 - 61 doi:10.1007/978-3-7091-6619-2_13. BibTeX |
| 17. | S. Selberherr, C. Fischer, S. Halama, C. Pichler, G. Rieger, G. Schrom, T. Simlinger: "The IC Processes of the Future: Advances in Device Structures and Device Simulation Techniques"; Talk: Eschola da Sociedade Brasileira de Microeletronica (EBMICRO), Recife; (invited) 1995-01-15 - 1995-01-20; in "Proceedings IV EBMICRO", (1995), Vol. 1, 87 - 114. BibTeX |
| 16. | S. Halama, F. Fasching, C. Fischer, H. Kosina, E. Leitner, C. Pichler, H. Pimingstorfer, H. Puchner, G. Rieger, G. Schrom, T. Simlinger, M. Stiftinger, H. Stippel, E. Strasser, W. Tuppa, K. Wimmer, S. Selberherr: "The Viennese Integrated System for Technology CAD Applications"; Talk: Workshop on Technology CAD Systems, Wien; (invited) 1993-09-06 in "Proceedings Technology CAD Systems Workshop", (1993), ISBN: 3-211-82505-3, 197 - 236 doi:10.1007/978-3-7091-9315-0_10. BibTeX |
| 15. | S. Halama, S. Selberherr: "Future Aspects of Process and Device Simulation"; Talk: Semiconductor Engineering and Technology Symposium (SET), Warschau; (invited) 1992-10-12 - 1992-10-14; in "Abstracts SET 92 Conference", (1992), ISBN: 83-01-11293-x, 83 - 85. BibTeX |
| 14. | H. Stippel, F. Fasching, C. Fischer, S. Halama, H. Pimingstorfer, W. Tuppa, K. Wimmer, S. Selberherr: "Implementation of a TCAD Framework"; Talk: European Simulation Multiconference (ESM), York; 1992-06-01 - 1992-06-03; in "Proceedings European Simulation Multiconference", (1992), ISBN: 1-56555-013-7, 131 - 135. BibTeX |
| 13. | S. Halama, F. Fasching, H. Pimingstorfer, W. Tuppa, S. Selberherr: "Consistent User Interface and Task-Level Architecture of a TCAD System"; Poster: International Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits (NUPAD), Seattle; 1992-05-31 - 1992-06-01; in "Proceedings NUPAD IV", (1992), ISBN: 0-7803-0516-7, 237 - 242. BibTeX |
| 12. | H. Stippel, S. Halama, G. Hobler, K. Wimmer, S. Selberherr: "Adaptive Grid for Monte Carlo Simulation of Ion Implantation"; Talk: International Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits (NUPAD), Seattle; 1992-05-31 - 1992-06-01; in "Proceedings NUPAD IV", (1992), ISBN: 0-7803-0516-7, 231 - 236. BibTeX |
| 11. | H. Pimingstorfer, S. Halama, S. Selberherr: "A TCAD Environment for Process and Device Engineering"; Talk: International Conference on VLSI and CAD (ICVC), Seoul; 1991-10-22 - 1991-10-25; in "Proceedings International Conference on VLSI and CAD 91", (1991), 280 - 283. BibTeX |
| 10. | F. Fasching, C. Fischer, S. Halama, H. Pimingstorfer, H. Read, S. Selberherr, H. Stippel, W. Tuppa, P. Verhas, K. Wimmer: "A New Open Technology CAD System"; Talk: European Solid-State Device Research Conference (ESSDERC), Montreux; 1991-09-16 - 1991-09-19; in "Proceedings of the European Solid-State Device Research Conference (ESSDERC)", (1991), ISBN: 0-444-89066-1, 217 - 220 doi:10.1016/0167-9317(91)90216-Z. BibTeX |
| 9. | H. Pimingstorfer, S. Halama, S. Selberherr, K. Wimmer, P. Verhas: "A Technology CAD Shell"; Talk: International Conference on the Simulation of Semiconductor Devices and Processes (SISDEP), Zürich; 1991-09-12 - 1991-09-14; in "Proceedings SISDEP 91", (1991), ISBN: 3-89191-476-8, 409 - 416. BibTeX |
| 8. | K. Wimmer, R. Bauer, S. Halama, G. Hobler, S. Selberherr: "Transformation Methods for Nonplanar Process Simulation"; Talk: International Conference on the Simulation of Semiconductor Devices and Processes (SISDEP), Zürich; 1991-09-12 - 1991-09-14; in "Proceedings SISDEP 91", (1991), ISBN: 3-89191-476-8, 131 - 138. BibTeX |
| 7. | S. Selberherr, C. Fischer, S. Halama, H. Pimingstorfer, H. Read, H. Stippel, P. Verhas, K. Wimmer: "The Viennese TCAD System"; Talk: VLSI Process and Device Modeling Workshop (VPAD), Oiso; (invited) 1991-05-26 - 1991-05-27; in "Proceedings VPAD Workshop", (1991), 32 - 35. BibTeX |
| 6. | F. Fasching, C. Fischer, S. Halama, H. Pimingstorfer, H. Read, S. Selberherr, H. Stippel, P. Verhas, K. Wimmer: "An Integrated Technology CAD Environment"; Talk: VLSI Technology, Systems and Applications Symposium (VLSITSA), Taipeh; 1991-05-22 - 1991-05-24; in "Proceedings VLSI Technology, Systems and Applications Symposium", (1991), ISBN: 0-7803-0036-x, 147 - 151. BibTeX |
| 5. | S. Halama, G. Hobler, K. Wimmer, S. Selberherr: "Eine neue Methode zur Simulation der Diffusion in allgemeinen Strukturen"; Talk: Seminar Grundlagen und Technologie elektronischer Bauelemente, Großarl; 1991-03-20 - 1991-03-23; in "Tagungsbericht Seminar Grundlagen und Technologie elektronischer Bauelemente", (1991), 20 - 26. BibTeX |
| 4. | K. Wimmer, R. Bauer, S. Halama, G. Hobler, S. Selberherr: "Simulation nichtplanarer Herstellungsprozesse mit PROMIS"; Talk: Seminar Grundlagen und Technologie elektronischer Bauelemente, Großarl; 1991-03-20 - 1991-03-23; in "Tagungsbericht Seminar Grundlagen und Technologie elektronischer Bauelemente", (1991), 10 - 19. BibTeX |
| 3. | S. Halama, K. Wimmer, G. Hobler, S. Selberherr: "Finite-Differenzen Dreiecksnetzgenerierung für die Prozess-Simulation mit PROMIS"; Talk: Workshop Numerische Simulation für Technologieentwicklung (NuTech), Garmisch-Partenkirchen; 1990-09-20 - 1990-09-21; in "Proceedings NuTech", (1990), 3. BibTeX |
| 2. | K. Wimmer, R. Bauer, S. Halama, G. Hobler, S. Selberherr: "Prozess-Simulation in nichtplanaren Strukturen mit PROMIS"; Talk: Workshop Numerische Simulation für Technologieentwicklung (NuTech), Garmisch-Partenkirchen; 1990-09-20 - 1990-09-21; in "Proceedings NuTech", (1990), 4. BibTeX |
| 1. | G. Hobler, S. Halama, K. Wimmer, S. Selberherr, H. Pötzl: "RTA-Simulations with the 2-D Process Simulator PROMIS"; Talk: International Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits (NUPAD), Honolulu; 1990-06-03 - 1990-06-04; in "NUPAD III Techn. Digest", (1990), 13 - 14. BibTeX |
| 1. | S. Halama: "The Viennese Integrated System for Technology CAD Applications"; Reviewer: S. Selberherr, D. Dietrich; Institut für Mikroelektronik, 1994, oral examination: 1994-05-27. BibTeX |
| 1. | S. Halama: "Untersuchung der thermischen Oxidation von Silicium mit Hilfe molekulardynamischer Simulationsmethoden"; Supervisor: G. Hobler, S. Selberherr; Institut für Mikroelektronik, 1989, . BibTeX |
| 3. | W. Bohmayr, S. Halama, C. Pichler, S. Selberherr, T. Simlinger, E. Strasser, W. Tuppa: "VISTA Status Report June 1994"; (1994), 25 page(s) . BibTeX |
| 2. | F. Fasching, S. Halama, C. Pichler, H. Pimingstorfer, G. Rieger, G. Schrom, S. Selberherr, M. Stiftinger: "VISTA Status Report June 1993"; (1993), 20 page(s) . BibTeX |
| 1. | S. Halama, C. Pichler, G. Rieger, S. Selberherr, T. Simlinger, H. Stippel, E. Strasser: "VISTA Status Report December 1993"; (1993), 19 page(s) . BibTeX |