Publications Stefan Halama

29 records

Books and Editorships

1.  F. Fasching, S. Halama, S. Selberherr (ed.):
"Technology CAD Systems";
Springer-Verlag, Wien - New York, 1993, ISBN: 978-3-7091-9317-4; 309 pages. https://doi.org/10.1007/978-3-7091-9315-0

Publications in Scientific Journals

3.  S. Halama, F. Fasching, C. Fischer, H. Kosina, E. Leitner, P. Lindorfer, C. Pichler, H. Pimingstorfer, H. Puchner, G. Rieger, G. Schrom, T. Simlinger, M. Stiftinger, H. Stippel, E. Strasser, W. Tuppa, K. Wimmer, S. Selberherr:
"The Viennese Integrated System for Technology CAD Applications";
Microelectronics Journal, 26 (1995), 137 - 158. https://doi.org/10.1016/0026-2692(95)98918-H

2.  S. Halama, C. Pichler, G. Rieger, G. Schrom, T. Simlinger, S. Selberherr:
"VISTA - User Interface, Task Level, and Tool Integration";
IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems, 14 (1995), 10; 1208 - 1222. https://doi.org/10.1109/43.466337

1.  S. Halama, S. Selberherr:
"Future Aspects of Process and Device Simulation";
Electron Technology (invited), 26 (1993), 49 - 57.

Contributions to Books

1.  S. Selberherr, C. Fischer, S. Halama, C. Pichler, G. Rieger, G. Schrom, T. Simlinger:
"Device Structures and Device Simulation Techniques";
in: "Low-Power HF Microelectronics", A.S. Machado (ed.); The Institution of Electrical Engineers, 1996, (invited), ISBN: 0-85296-874-4, 57 - 83. https://doi.org/10.1049/PBCS008E_ch2

Talks and Poster Presentations (with Proceedings-Entry)

19.  G. Rieger, S. Halama, S. Selberherr:
"A Graphical Editor for TCAD Purposes";
Poster: Conference on Geometric Design, Nashville; 1995-12-30; in: "Abstracts SIAM Conf. On Geometric Design", (1995), A17.

18.  G. Rieger, S. Halama, S. Selberherr:
"A Programmable Tool for Interactive Wafer-State Level Data Processing";
Talk: International Conference on the Simulation of Semiconductor Devices and Processes (SISDEP), Erlangen; 1995-09-06 - 1995-09-08; in: "Proceedings SISDEP 95 Conference", (1995), ISBN: 3-211-82736-6; 58 - 61. https://doi.org/10.1007/978-3-7091-6619-2_13

17.  S. Selberherr, C. Fischer, S. Halama, C. Pichler, G. Rieger, G. Schrom, T. Simlinger:
"The IC Processes of the Future: Advances in Device Structures and Device Simulation Techniques";
Talk: Eschola da Sociedade Brasileira de Microeletronica (EBMICRO), Recife (invited); 1995-01-15 - 1995-01-20; in: "Proceedings IV EBMICRO", Vol. 1 (1995), 87 - 114.

16.  S. Halama, F. Fasching, C. Fischer, H. Kosina, E. Leitner, C. Pichler, H. Pimingstorfer, H. Puchner, G. Rieger, G. Schrom, T. Simlinger, M. Stiftinger, H. Stippel, E. Strasser, W. Tuppa, K. Wimmer, S. Selberherr:
"The Viennese Integrated System for Technology CAD Applications";
Talk: Workshop on Technology CAD Systems, Wien (invited); 1993-09-06; in: "Proceedings Technology CAD Systems Workshop", (1993), ISBN: 3-211-82505-3; 197 - 236. https://doi.org/10.1007/978-3-7091-9315-0_10

15.  H. Stippel, S. Halama, G. Hobler, K. Wimmer, S. Selberherr:
"Adaptive Grid for Monte Carlo Simulation of Ion Implantation";
Talk: International Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits (NUPAD), Seattle; 1992-05-31 - 1992-06-01; in: "Proceedings NUPAD IV", (1992), ISBN: 0-7803-0516-7; 231 - 236.

14.  S. Halama, F. Fasching, H. Pimingstorfer, W. Tuppa, S. Selberherr:
"Consistent User Interface and Task-Level Architecture of a TCAD System";
Poster: International Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits (NUPAD), Seattle; 1992-05-31 - 1992-06-01; in: "Proceedings NUPAD IV", (1992), ISBN: 0-7803-0516-7; 237 - 242.

13.  S. Halama, S. Selberherr:
"Future Aspects of Process and Device Simulation";
Talk: Semiconductor Engineering and Technology Symposium (SET), Warschau (invited); 1992-10-12 - 1992-10-14; in: "Abstracts SET 92 Conference", (1992), ISBN: 83-01-11293-x; 83 - 85.

12.  H. Stippel, F. Fasching, C. Fischer, S. Halama, H. Pimingstorfer, W. Tuppa, K. Wimmer, S. Selberherr:
"Implementation of a TCAD Framework";
Talk: European Simulation Multiconference (ESM), York; 1992-06-01 - 1992-06-03; in: "Proceedings European Simulation Multiconference", (1992), ISBN: 1-56555-013-7; 131 - 135.

11.  F. Fasching, C. Fischer, S. Halama, H. Pimingstorfer, H. Read, S. Selberherr, H. Stippel, W. Tuppa, P. Verhas, K. Wimmer:
"A New Open Technology CAD System";
Talk: European Solid-State Device Research Conference (ESSDERC), Montreux; 1991-09-16 - 1991-09-19; in: "Proceedings of the European Solid-State Device Research Conference (ESSDERC)", (1991), ISBN: 0-444-89066-1; 217 - 220. https://doi.org/10.1016/0167-9317(91)90216-Z

10.  H. Pimingstorfer, S. Halama, S. Selberherr:
"A TCAD Environment for Process and Device Engineering";
Talk: International Conference on VLSI and CAD (ICVC), Seoul; 1991-10-22 - 1991-10-25; in: "Proceedings International Conference on VLSI and CAD 91", (1991), 280 - 283.

9.  H. Pimingstorfer, S. Halama, S. Selberherr, K. Wimmer, P. Verhas:
"A Technology CAD Shell";
Talk: International Conference on the Simulation of Semiconductor Devices and Processes (SISDEP), Zürich; 1991-09-12 - 1991-09-14; in: "Proceedings SISDEP 91", (1991), ISBN: 3-89191-476-8; 409 - 416.

8.  F. Fasching, C. Fischer, S. Halama, H. Pimingstorfer, H. Read, S. Selberherr, H. Stippel, P. Verhas, K. Wimmer:
"An Integrated Technology CAD Environment";
Talk: VLSI Technology, Systems and Applications Symposium (VLSITSA), Taipeh; 1991-05-22 - 1991-05-24; in: "Proceedings VLSI Technology, Systems and Applications Symposium", (1991), ISBN: 0-7803-0036-x; 147 - 151.

7.  S. Halama, G. Hobler, K. Wimmer, S. Selberherr:
"Eine neue Methode zur Simulation der Diffusion in allgemeinen Strukturen";
Talk: Seminar Grundlagen und Technologie elektronischer Bauelemente, Großarl; 1991-03-20 - 1991-03-23; in: "Tagungsbericht Seminar Grundlagen und Technologie elektronischer Bauelemente", (1991), 20 - 26.

6.  K. Wimmer, R. Bauer, S. Halama, G. Hobler, S. Selberherr:
"Simulation nichtplanarer Herstellungsprozesse mit PROMIS";
Talk: Seminar Grundlagen und Technologie elektronischer Bauelemente, Großarl; 1991-03-20 - 1991-03-23; in: "Tagungsbericht Seminar Grundlagen und Technologie elektronischer Bauelemente", (1991), 10 - 19.

5.  S. Selberherr, C. Fischer, S. Halama, H. Pimingstorfer, H. Read, H. Stippel, P. Verhas, K. Wimmer:
"The Viennese TCAD System";
Talk: VLSI Process and Device Modeling Workshop (VPAD), Oiso (invited); 1991-05-26 - 1991-05-27; in: "Proceedings VPAD Workshop", (1991), 32 - 35.

4.  K. Wimmer, R. Bauer, S. Halama, G. Hobler, S. Selberherr:
"Transformation Methods for Nonplanar Process Simulation";
Talk: International Conference on the Simulation of Semiconductor Devices and Processes (SISDEP), Zürich; 1991-09-12 - 1991-09-14; in: "Proceedings SISDEP 91", (1991), ISBN: 3-89191-476-8; 131 - 138.

3.  S. Halama, K. Wimmer, G. Hobler, S. Selberherr:
"Finite-Differenzen Dreiecksnetzgenerierung für die Prozess-Simulation mit PROMIS";
Talk: Workshop Numerische Simulation für Technologieentwicklung (NuTech), Garmisch-Partenkirchen; 1990-09-20 - 1990-09-21; in: "Proceedings NuTech", (1990), 3.

2.  K. Wimmer, R. Bauer, S. Halama, G. Hobler, S. Selberherr:
"Prozess-Simulation in nichtplanaren Strukturen mit PROMIS";
Talk: Workshop Numerische Simulation für Technologieentwicklung (NuTech), Garmisch-Partenkirchen; 1990-09-20 - 1990-09-21; in: "Proceedings NuTech", (1990), 4.

1.  G. Hobler, S. Halama, K. Wimmer, S. Selberherr, H. Pötzl:
"RTA-Simulations with the 2-D Process Simulator PROMIS";
Talk: International Workshop on Numerical Modeling of Processes and Devices for Integrated Circuits (NUPAD), Honolulu; 1990-06-03 - 1990-06-04; in: "NUPAD III Techn. Digest", (1990), 13 - 14.

Doctor's Theses (authored and supervised)

1.  S. Halama:
"The Viennese Integrated System for Technology CAD Applications";
Supervisor, Reviewer: S. Selberherr, D. Dietrich; Institut für Mikroelektronik, 1994; oral examination: 1994-05-27.

Diploma and Master Theses (authored and supervised)

1.  S. Halama:
"Untersuchung der thermischen Oxidation von Silicium mit Hilfe molekulardynamischer Simulationsmethoden";
Supervisor: G. Hobler, S. Selberherr; Institut für Mikroelektronik, 1989.

Scientific Reports

3.  W. Bohmayr, S. Halama, C. Pichler, S. Selberherr, T. Simlinger, E. Strasser, W. Tuppa:
"VISTA Status Report June 1994";
1994; 25 pages.

2.  S. Halama, C. Pichler, G. Rieger, S. Selberherr, T. Simlinger, H. Stippel, E. Strasser:
"VISTA Status Report December 1993";
1993; 19 pages.

1.  F. Fasching, S. Halama, C. Pichler, H. Pimingstorfer, G. Rieger, G. Schrom, S. Selberherr, M. Stiftinger:
"VISTA Status Report June 1993";
1993; 20 pages.