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Publications Tobias Reiter

17 records

Publications in Scientific Journals

7.   Reiter, T., Aguinsky, L. F., Souza Berti Rodrigues, F., Weinbub, J., Hössinger, A., Filipovic, L. (2024).
Modeling the Impact of Incomplete Conformality During Atomic Layer Processing.
Solid-State Electronics, 211, Article 108816. https://doi.org/10.1016/j.sse.2023.108816 (reposiTUm)

6.   Filipovic, L., Baumgartner, O., Klemenschits, X., Piso, J., Bobinac, J., Reiter, T., Strof, G., Rzepa, G., Stanojevic, Z., Karner, M. (2023).
DTCO Flow for Air Spacer Generation and Its Impact on Power and Performance at N7.
Solid-State Electronics, 199, Article 108527. https://doi.org/10.1016/j.sse.2022.108527 (reposiTUm)

5.   Bobinac, J., Reiter, T., Piso, J., Klemenschits, X., Baumgartner, O., Stanojevic, Z., Strof, G., Karner, M., Filipovic, L. (2023).
Effect of Mask Geometry Variation on Plasma Etching Profiles.
Micromachines, 14(3), Article 665. https://doi.org/10.3390/mi14030665 (reposiTUm)

4.   Aguinsky, L. F., Souza Berti Rodrigues, F., Reiter, T., Klemenschits, X., Filipovic, L., Hössinger, A., Weinbub, J. (2023).
Modeling Incomplete Conformality During Atomic Layer Deposition in High Aspect Ratio Structures.
Solid-State Electronics, 201, Article 108584. https://doi.org/10.1016/j.sse.2022.108584 (reposiTUm)

3.   Horodynski, M., Reiter, T., Kühmayer, M., Rotter, S. (2023).
Tractor Beams With Optimal Pulling Force Using Structured Waves.
Physical Review A, 108(2), Article 023504. https://doi.org/10.1103/PhysRevA.108.023504 (reposiTUm)

2.   Kersten, W. N., De Zordo, N., Diekmann, O., Reiter, T., Zens, M., Kanagin, A. N., Rotter, S., Schmiedmayer, H.-J., Angerer, A. (2023).
Triggered Superradiance and Spin Inversion Storage in a Hybrid Quantum System.
Physical Review Letters, 131(4), 043601-1-043601–043606. https://doi.org/10.1103/PhysRevLett.131.043601 (reposiTUm)

1.   Reiter, T., Klemenschits, X., Filipovic, L. (2022).
Impact of Plasma Induced Damage on the Fabrication of 3D NAND Flash Memory.
Solid-State Electronics, 192(108261), 108261. https://doi.org/10.1016/j.sse.2022.108261 (reposiTUm)

Talks and Poster Presentations (with Proceedings-Entry)

8.   Reiter, T., Filipovic, L. (2023).
Fast 3D Flux Calculation Using Monte Carlo Ray Tracing on GPUs.
In Proceedings of the International Conference on Microelectronic Devices and Technologies (MicDAT '2023)) (pp. 67–72), Funchal, Portugal. https://doi.org/10.13140/RG.2.2.13265.71524 (reposiTUm)

7.   Reiter, T., Toifl, A., Hössinger, A., Filipovic, L. (2023).
Modeling Oxide Regrowth During Selective Etching in Vertical 3D NAND Structures.
In 2023 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (pp. 85–88), Kobe, Japan. https://doi.org/10.23919/SISPAD57422.2023.10319506 (reposiTUm)

6.   Filipovic, L., Bobinac, J., Piso, J., Reiter, T. (2023).
Physics-Informed Compact Model for SF6/O2 Plasma Etching.
In 2023 International Conference on Simulation of Semiconductor Processes and Devices (SISPAD) (pp. 73–76), Kobe, Japan. https://doi.org/10.23919/SISPAD57422.2023.10319479 (reposiTUm)

5.   Filipovic, L., Reiter, T., Klemenschits, X., Leroch, S., Stella, R., Baumgartner, O., Hössinger, A. (2023).
Process Simulation in Micro- And Nano-Electronics.
In Book of abstracts of the International Workshop on Computational Nanotechnology 2023 (pp. 38–39), Barcelona, Spain. (reposiTUm)

4.   Filipovic, L., Baumgartner, O., Piso, J., Bobinac, J., Reiter, T., Strof, G., Rzepa, G., Stanojevic, Z., Karner, M. (2022).
DTCO Flow for Air Spacer Generation and Its Impact on Power and Performance at N7.
In SISPAD 2022: International Conference on Simulation of Semiconductor Processes and Devices - Conference Abstract Booklet (pp. 34–35), Granada, Spain. (reposiTUm)

3.   Bobinac, J., Reiter, T., Piso, J., Klemenschits, X., Baumgartner, O., Stanojevic, Z., Strof, G., Karner, M., Filipovic, L. (2022).
Impact of Mask Tapering on SF6/O2 Plasma Etching.
In Microelectronic Devices and Technologies: Proceedings of the 4rd International Conference on Microelectronic Devices and Technologies (MicDAT '2022) (pp. 90–94), Corfu, Greece. (reposiTUm)

2.   Reiter, T., Klemenschits, X., Filipovic, L. (2022).
Modeling Plasma-Induced Damage During the Dry Etching of Silicon.
In 2022 IEEE International Integrated Reliability Workshop (IIRW) (pp. 1–5), South Lake Tahoe, CA, United States. https://doi.org/10.1109/IIRW56459.2022.10032764 (reposiTUm)

1.   Reiter, T., Klemenschits, X., Filipovic, L. (2021).
Impact of High-Aspect-Ratio Etching Damage on Selective Epitaxial Silicon Growth in 3D NAND Flash Memory.
In 2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS'2021), Caen, France. https://doi.org/10.1109/eurosoi-ulis53016.2021.9560693 (reposiTUm)

Diploma and Master Theses (authored and supervised)

2.  T. Reiter:
"Stabilisierung von Spin-Ensembles in hybriden Quantensystemen";
Supervisor: S. Rotter; Institut für Theoretische Physik (136), 2022; final examination: 2022-04-29.

1.   Reiter, T. (2022).
Stabilization of Spin Ensembles in Hybrid Quantum Systems
 Technische Universität Wien. https://doi.org/10.34726/hss.2022.96371 (reposiTUm)