Publications Tobias Reiter
6 records
| 1. | T. Reiter, X. Klemenschits, L. Filipovic: "Impact of Plasma Induced Damage on the Fabrication of 3D NAND Flash Memory"; Solid-State Electronics, 192, (invited) (2022), 108261-1 - 108261-9 doi:10.1016/j.sse.2022.108261. BibTeX |
| 1. | T. Reiter, X. Klemenschits, L. Filipovic: "Impact of High-Aspect-Ratio Etching Damage on Selective Epitaxial Silicon Growth in 3D NAND Flash Memory"; in "Proceedings of the 2021 Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)", B. Cretu (ed); IEEE, 2021, ISBN: 978-1-6654-3745-5, 1 - 4 doi:10.1109/EuroSOI-ULIS53016.2021.9560693. BibTeX |
| 3. | J. Bobinac, T. Reiter, J. Piso, X. Klemenschits, O. Baumgartner, Z. Stanojevic, G. Strof, M. Karner, L. Filipovic: "Impact of Mask Tapering on SF6/O2 Plasma Etching"; Talk: Fourth International Conference on Microelectronic Devices and Technologies (MicDAT '2022), Corfu, Greece; 2022-09-21 - 2022-09-23; in "Microelectronic Devices and Technologies: Proceedings of the 4rd International Conference on Microelectronic Devices and Technologies (MicDAT '2022)", (2022), ISBN: 978-84-09-43856-3, 90 - 94. BibTeX |
| 2. | L. Filipovic, O. Baumgartner, J. Piso, J. Bobinac, T. Reiter, G. Strof, G. Rzepa, Z. Stanojevic, M. Karner: "DTCO Flow for Air Spacer Generation and its Impact on Power and Performance at N7"; Talk: International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2022), Granada, Spain; 2022-09-06 - 2022-09-08; in "SISPAD 2022: International Conference on Simulation of Semiconductor Processes and Devices - Conference Abstract Booklet", (2022), 34 - 35. BibTeX |
| 1. | T. Reiter, X. Klemenschits, L. Filipovic: "Impact of High-Aspect-Ratio Etching Damage on Selective Epitaxial Silicon Growth in 3D NAND Flash Memory"; Poster: Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS), Caen, France; 2021-09-01 - 2021-09-03; in "Book of Abstracts of the Joint International EUROSOI Workshop and International Conference on Ultimate Integration on Silicon (EUROSOI-ULIS)", (2021), 34 - 35. BibTeX |
| 1. | T. Reiter: "Stabilisierung von Spin-Ensembles in hybriden Quantensystemen"; Supervisor: S. Rotter; Institut für Theoretische Physik (136), 2022, final examination: 2022-04-29. BibTeX |