Projects Details

Process Optimisation in Multiple Dimensions for Semiconductor Technology

  
Project Number E8150 PROMPT   
Start of Project 31. January 1994
End of Project 29. June 1996
Additional Information Entry in CORDIS

Abstract

The aim of the PROMPT project was the development of an engineering program system suitable to provide appropriate input (topography, doping) for three-dimensional device simulation.

The main tasks for the development of a multi-dimensional process simulation system were:

• the compilation of three-dimensional profiles from one-dimensional, two-dimensional, and three-dimensional process simulation.

• the use of existing one-dimensional and two-dimensional programs.

• the development of new three-dimensional simulation modules.

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