8.2.1 Printing of a Contact Hole over Planar Substrate

Figure 8.18: PAC concentration after exposure and developed resist profile for contact hole printing over a planar silicon substrate for coherent illumination (left: best focus, right: 1 $\mu$ m defocus above).

$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ....5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REexposPlanarCohe.eps}}$	$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...$\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REexposPlanarCoheDef.eps}}$
$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ....5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REdevelPlanarCohe.eps}}$	$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...$\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REdevelPlanarCoheDef.eps}}$

Figure 8.19: PAC concentration after exposure and developed resist profile for contact hole printing over a planar silicon substrate for circular illumination (left: best focus, right: 1 $\mu$ m defocus above).

$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ....5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REexposPlanarCirc.eps}}$	$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...$\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REexposPlanarCircDef.eps}}$
$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ....5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REdevelPlanarCirc.eps}}$	$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...$\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REdevelPlanarCircDef.eps}}$

Figure 8.20: PAC concentration after exposure and developed resist profile for contact hole printing over a planar silicon substrate for quadrupole illumination (left: best focus, right: 1 $\mu$ m defocus above).

$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ....5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REexposPlanarQuad.eps}}$	$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...$\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REexposPlanarQuadDef.eps}}$
$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ....5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REdevelPlanarQuad.eps}}$	$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...$\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REdevelPlanarQuadDef.eps}}$