8.2.2 Printing of a Contact Hole over Dielectric Step

Figure 8.21: PAC concentration after exposure and developed resist profile for contact hole printing over a dielectric oxide step for coherent illumination (left: best focus, right: 1 $\mu$ m defocus above).

$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...{0.5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REexposDielCohe.eps}}$	$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REexposDielCoheDef.eps}}$
$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...{0.5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REdevelDielCohe.eps}}$	$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REdevelDielCoheDef.eps}}$

Figure 8.22: PAC concentration after exposure and developed resist profile for contact hole printing over a dielectric oxide step for circular illumination (left: best focus, right: 1 $\mu$ m defocus above).

$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...{0.5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REexposDielCirc.eps}}$	$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REexposDielCircDef.eps}}$
$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...{0.5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REdevelDielCirc.eps}}$	$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REdevelDielCircDef.eps}}$

Figure 8.23: PAC concentration after exposure and developed resist profile for contact hole printing over a dielectric oxide step for quadrupole illumination (left: best focus, right: 1 $\mu$ m defocus above).

$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...{0.5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REexposDielQuad.eps}}$	$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REexposDielQuadDef.eps}}$
$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...{0.5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REdevelDielQuad.eps}}$	$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REdevelDielQuadDef.eps}}$