We have presented an approach which deals with the complexity typically exposed by semiconductor structures. It avoids the tetrahedrization of the entire convex hull of the point set and a later segmentation step. The minimum of information (the surface description of the non-convex parts of the structure) is sufficient to generate a mesh. The method is therefore well suited for the integration into a fully automatic integrated system, e.g. a framework for semiconductor simulation applications. It allows reusing grid nodes from other meshes defining other magnitudes on the same structure. This becomes important in cases where it is desired to merge several meshes.
It is capable to handle regridding situations efficiently and produces fully flexible unstructured tetrahedral Delaunay meshes. Arbitrary additionally desired element measures can be implemented. This results in improved quality meshes compared to Delaunay-only grids. This is a significant progress to the not fully unstructured techniques like octree or other cartesian based methods often used for TCAD applications.