1.1.5 SWR -- Semiconductor Wafer Representation

The SWR [19] is based on an object-oriented client server architecture that consists of a set of C++ class definitions. It defines an information model that is separated into utilities for geometry servers and for grid (field) servers. A three-dimensional implementation of the SWR field server specification can be found in [20]. The work from Sahul et al [21] is an extension of SWR. It defines and implements an integration of process simulation tools. The work is however, limited to two spatial dimensions.