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List of Abbreviations

BTRM
ballistic transport and reaction model
CFL
Courant-Friedrichs-Lewy
CMP
chemical-mechanical planarization
CPU
central processing unit
CVD
chemical vapor deposition
DC
direct current
DTG
dynamic tubular grid
EVRM
equi-volume rate model
FIB
focused ion beam
FWHM
full width at half maximum
H-RLE
hierarchical run-length encoded
IC
integrated circuit
KOH
potassium hydroxide
LS
level set
MC
Monte Carlo
MEMS
microelectromechanical systems
OM
object median
PVD
physical vapor deposition
RF
radio frequency
RLE
run-length encoded
SAH
surface area heuristic
SM
spatial median
STL
standard template library
TCAD
technology computer-aided design
TEOS
tetraethyl orthosilicate


next up previous contents
Next: List of Symbols Up: Dissertation Otmar Ertl Previous: List of Algorithms

Otmar Ertl: Numerical Methods for Topography Simulation