List of Abbreviations

AFM	atomic force microscope
ALE	atomic layer epitaxy
BiCS	bit cost scalable
CM	contact mode
CMOS	complementary metal oxide semiconductor
CMP	chemical mechanical planarization
CPD	cumulative probability distribution
CVD	chemical Vapor Deposition
DC-SF	dual control-gate with surrounding floating-gate
DFT	density functional theory
DTG	dynamic tubular grid
ESD	electrostatic spray deposition
EUV	extreme ultraviolet
FDM	finite difference method
FEM	finite element method
FN	Fowler-Nordheim
FWHM	full width at half maximum
H-RLE	hierarchical run length encoding
HPCVD	high pressure chemical vapor deposition
HTO	high temperature oxide
IC	integrated circuit
ICM	intermittent contact mode
LAO	local anodic oxidation
LCD	liquid crystal display
LOCOS	local oxidation of silicon
LON	local oxidation nanolithography
LS	Level Set
MC	Monte Carlo
MOS	metal oxide semiconductor
NAOS	nitric acid oxidation of silicon
NCM	non-contact mode
PDF	probability density function
PECVD	plasma enhanced chemical vapor deposition
PSD	pressurized spray deposition
PVD	physical vapor deposition
RAH	relative air humidity
RF	radio frequency
RLE	run length encoding
RTA	rapid thermal annealing
SCD	surface charge density
SiNWT	silicon nanowire transistor
SOI	silicon on insulator
SPM	scanning probe microscopy
STI	shallow trench isolation
STM	scanning tunneling microscope
TCAD	technology computer aided design
TCAT	terabit cell array transistor
TEOS	tetraethyl orthosilicate
TFT	thin film transistor
TM	tapping mode
TMAH	tetramethylammonium hydroxide
TVD	total variation diminishing
UHV	ultra high vacuum
USB	universal serial bus
UV	ultraviolet
VSAT	vertical stacked array transi
YSZ	yttria-stabilized zirconia