Two-dimensional point response functions are modeled by combining two of the functions presented in Sec. 3.1.1. One vertical function is multiplied with a lateral function, which additionally meets the requirement that its projected range is zero. Furthermore the moments of the lateral function depend on the vertical coordinate . Worth mentioning is that a coordinate system is used where is parallel to the ion beam direction.
(3.40) |
(3.41) |
(3.42) |
[12], [33], [54], [56] provide calibrated two-dimensional point response functions for the implantation with boron, phosphorus, arsenic and antimony ions into amorphous and crystalline silicon, into silicon dioxide and silicon nitride.
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