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To model technology innovations more advanced simulation methods are required to
accurately cope with the involved highly sophisticated physical processes.
The needed computational resources and, especially, the simulation time
increase considerably restricting the application to a single or
to a small number of features at most.
Unfortunately, this situation counteracts the need for large
simulation domains as particularly necessary for simulation of
optical proximity correction. Hence, depending on the simulation task,
either feature-size or die-size simulation approaches have
to be chosen.
3.3 Modeling of Technology Innovations
Heinrich Kirchauer, Institute for Microelectronics, TU Vienna