It is required to specify the file names for the input PBF (inputPBF) and output PBF (outputPBF) files which hold the complete descriptions of the simulated device structure before and after the simulated diffusion process in PIF file format. The according Parameters are listed in Table 4.4.
Name | Type | Description | |
inputPBF | MdlString |
|
|
outputPBF | MdlString |
|
|
compileMdl | MdlString |
|