Table 5.2 gives a list of presently integrated simulation tools, respective fabrication processes, and symbolic names. Additional simulators and applications can be easily added by registering a binding function, a set of default values, and some additional information for editing and validity checks.
Table 5.2: Simulation tools and processes for process
simulation.
Table 5.3 gives a list of
available basic process steps. To accommodate additional processes and
to specify process steps in greater detail,
the process flow statement vocabulary is extendible by defining new
entries. For a given statement, any number of specializations can
be added as new statements with certain parameters set to the
desired values without need for additional coding. For example, a
CVD oxide step is derived from a more general CVD step by
permanently assigning the value SiO
to the material parameter.
Table 5.3: Basic fabrication processes.