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Next: 5.4.1 Process Modeling Up: 5. Application Previous: 5.3 Inverse Modeling of

5.4 Task Description

The goal of this optimization is to find a scalable analytical doping profile. It has to be consistent with the results of the process simulation, valid for several gate lengths, and match the electrical data measured from the test-wafers.

Figure 5.13: Structure of the first part of the inverse modeling task.
\includegraphics[width=\linewidth]{graphics/appc_struct1.eps}

Figure 5.14: Structure of the second part of the inverse modeling task.
\includegraphics[width=\linewidth]{graphics/appc_struct2.eps}






R. Plasun