| CAD | Computer Aided Design |
| CASE | Computer Aided Software Engineering |
| CMOS | Complementary MOS |
| DoE | Design of Experiments |
| DMOS | Double-diffused Metal Oxide Semiconductor |
| FET | Field Effect Transistor |
| GUI | Graphical User Interface |
| HBT | Heterojunction Bipolar Transistor |
| LDD | Lightly Doped Drain |
| MOS | Metal Oxide Semiconductor |
| MOSFET | MOS Field Effect Transistor |
| NMOS | N-channel MOS |
| PIF | Profile Interchange Format |
| PMOS | P-channel MOS |
| RSM | Response Surface Methodology |
| SIESTA | Simulation Environment for Semiconductor Technology Analysis |
| SIMS | Secondary Ion Mass Spectroscopy |
| TCAD | Technology Computer Aided Design |
| VDMOS | Vertical Double-diffused Metal Oxide Semiconductor |
| VISTA | Vienna Integrated System for TCAD Applications |
| VLSI | Very Large Scale Integration |