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Next: 1.1 Purpose of TCAD Up: Dissertation Previous: List of Acronyms

1. Introduction

For the manufacturing process of a state of the art Very Large Scale Integration (VLSI) technology several hundred production steps have to be performed. Shrinking device structures increase the importance of the interconnect layers dramatically. Numerical simulation of fabrication processes and electrical characteristics reduces the experimental runs required during development and manufacturing.






R. Plasun