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2.1.1 Central Moments and their Distribution Functions

 

The i-th non-central moments of a probability density function f(x) are defined by:

  equation395

By introducing a bias, practically the mean value of the distribution, we get the central moments:

  equation401

The characteristic parameters such as projected range tex2html_wrap_inline4831 , standard deviation tex2html_wrap_inline4833 , skewness tex2html_wrap_inline4835 , and kurtosis tex2html_wrap_inline4837 can be expressed in terms of these central moments:

eqnarray406

It is also possible to define the characteristic parameters tex2html_wrap_inline4831 , tex2html_wrap_inline4833 , tex2html_wrap_inline4835 , and tex2html_wrap_inline4837 directly by their probability density function f(x), as can be found in [Wim93]. Several density distribution functions are based on central moments, like the most popular Gaussian distribution (2.1-9 ). It uses only two characteristic parameters tex2html_wrap_inline4831 and tex2html_wrap_inline4833 , and the approximation of ion implantation profiles can therefore be rather inaccurate.

  equation415

Especially for nonsymmetric ion implantation profiles the lack of accuracy in the tail of the density functions constrain the usage of other functions like the Joined Half Gaussian density function [Gib73] or the Pearson density function [Hof75a].

The Joined Half Gaussian density function is defined by two Gaussian functions, which join at a modal projected range. The major drawback of this density function is a restricted range of skewness values. Better fits can be achieved by the Pearson density function family. The Pearson density functions are derived as solutions of the differential equation (2.1-10).

  equation425

The Pearson coefficients a, tex2html_wrap_inline4855 , tex2html_wrap_inline4857 , and tex2html_wrap_inline4859 can be expressed in terms of the first four characteristic parameters:

     eqnarray432

Depending on the values of tex2html_wrap_inline4835 and tex2html_wrap_inline4837 , seven different solutions for the Pearson family can be obtained. For practical implantation applications the Pearson IV density function is frequently used [Rys81] [Sel84]. By combining two Pearson density functions, using one for the surface region and the other one for the bulk, it is also possible to model typical channeling tails of implantation profiles [Par90] [Yan95].


next up previous contents
Next: 2.1.2 Probability Weighted Moments Up: 2.1 Statistical Moments and Previous: 2.1 Statistical Moments and

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