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#

3.1 Solid Modeling

In the following, the available *solid modeling* operations are
introduced. The aim of this section is to demonstrate the possibilities for the
geometry generation and to give a hint on the complexity of achievable geometry
modifications. Special sections are devoted to the definition of the
*simulation domain* (Section 3.1.1), to the application of
*masks* (Section 3.1.2), to a so called *filling*
operation (Section 3.1.3), to *chemical mechanical
planarization* (Section 3.1.4), to *stripping* of
materials (Section 3.1.5), and to *oxidation* forming ``bird's
peaks'' (Section 3.1.6).

**Subsections**

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W. Pyka: Feature Scale Modeling for Etching and
Deposition Processes in Semiconductor Manufacturing