List of Abbreviations

1D One dimensional
2.5D Two and a half dimensional
2D Two dimensional
3D Three dimensional
BEOL Back end of line
CAD Computer aided design
CMOS Complementary metal oxide semiconductor
CPU Central processing unit
DE Differential equation
FEM Finite element method
FEOL Front end of line
IC Integrated circuit
IMC Intermetallic compound
MTTF Mean-time-to-failure
NoC Network on chip
PDE Partial differential equation
PoP Package on package
P Packaging
RDL Redistribution layer
SIC Stacked integrated circuit
SiP System in package
SoC System on chip
SOI Silicon on insulator
SSI Small scale integration
TCAD Technology computer aided design
TSV Through silicon via
TTF Time-to-failure
UBM Under bump metallization
ULSI Ultra large scale integration
VLSI Very large scale integration
WLP Wafer level packaging



M. Rovitto: Electromigration Reliability Issue in Interconnects for Three-Dimensional Integration Technologies