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Next: Etching and Deposition Up: 2.1.1 Topography Processing Previous: 2.1.1 Topography Processing Lithography

The structural information is transferred to the semiconductor's surface by means of lithography processing. Several tools are available to model lithography processing. The most notable are LISI [42], and SAMPLE [78]. These tools require considerable computational resources and time, hence it is sometimes necessary to simulate lithography using rather simple models such as SKETCH [48] within the VISTA [29] tool set.

Rudi Strasser