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Next: Semiconductor Wafer Descriptions Up: 5.1 Modeling Fabrication Processes Previous: 5.1.4 Lithography Masks

5.1.5 Using Heterogeneous Process Simulation Tools

Performing a process simulation with heterogenous simulation tools is a non-trivial challenge. Slight differences in the representation of the semiconductor wafer, which is used to transfer the state of the process simulation from one tool to another, can cause the loss of information. However, some simulators offer special features (more elaborate physical models, better performance in terms of speed, etc.) which make their application desirable.

Rudi Strasser