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Performing a process simulation with heterogenous simulation tools is
a non-trivial challenge. Slight differences in the representation of
the semiconductor wafer, which is used to transfer the state of the
process simulation from one tool to another, can cause the loss of
information. However, some simulators offer special features (more
elaborate physical models, better performance in terms of speed, etc.)
which make their application desirable.
Rudi Strasser
1999-05-27