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Next: 5.1.1 Controlling Simulation Tools Up: 5. Building Simulation Models Previous: 5. Building Simulation Models

5.1 Modeling Fabrication Processes

The simulation-flow-model (Description 3.2) can be utilized to encapsulate process simulation tools. These process simulation tools are inserted into the tool-flow of the simulation-flow-model as shown in Example 5.1. The example demonstrates how the DIOS process simulator and its associated recipe generation tool LIGAMENT can be controlled within a simulation-flow-model.
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\textit{mask} defines the mask set used during processing.}

Rudi Strasser