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This section describes the calculation of the strain tensor resulting from a uniaxial stress of magnitude along an arbitrary direction.
Analysis begins by adopting a coordinate system in which the axis is parallel to the stress direction. This system is related to the coordinate system of the primary crystallographic axes of the semiconductor by a rotation
(3.16) |
Previous: 3.3.1 The Miller Index Notation Up: 3.3 Stress-Strain Relations Next: 3.3.3 Strain Resulting from Epitaxy |