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Next: 8.1.2 Imaging Enhancement Techniques Up: 8.1 Aerial Image Simulation Previous: 8.1 Aerial Image Simulation

8.1.1 Entire Layout


The aerial images of the entire layout depicted in Figure 8.3 and Figure 8.5 show that all four layers can be printed in sufficient quality if no focus errors occur, but the images are completely spoiled for a defocus of 1 $ \mu$m since the patterns are totally blurred and the whole image information gets lost. In Figure 8.4 and Figure 8.6 the upper right corner of the layout is zoomed, which clearly exhibits the image degradation. The following particularities can be observed from the plots: Compensation techniques for these disturbing effects are discussed in the subsequent section.


  
Figure 8.1: Entire layout of a 4:16 multiplexer fabricated in a 0.25 $ \mu$m technology. The following four mask layers are drawn one upon the other: ACTIVE-AREA (green), POLY1 (red), CONTACT (white), and METAL1 (blue). Separate plots of each layer are shown in Figure 8.2.
\resizebox{!}{0.890\textwidth}{\includegraphics{RElayout.eps}}


  
Figure 8.2: The four layers of interest: ACTIVE-AREA (upper-left), POLY1 (upper-right), CONTACT (lower-left), and METAL1 (lower-right). The aerial images for best focus are shown in Figure 8.3, and for a defocus of 1 $ \mu$m in Figure 8.5.
\resizebox{!}{0.439\textwidth}{\includegraphics{REactive-area.eps}} \resizebox{!}{0.439\textwidth}{\includegraphics{REpoly1.eps}}
\resizebox{!}{0.439\textwidth}{\includegraphics{REcontact.eps}} \resizebox{!}{0.439\textwidth}{\includegraphics{REmetal1.eps}}


  
Figure 8.3: Aerial images for best focus: ACTIVE-AREA (upper-left), POLY1 (upper-right), CONTACT (lower-left), and METAL1 (lower-right).
\makebox[0pt][l]{
\resizebox{!}{0.439\textwidth}{\includegraphics{REactive-area...
....322\textwidth}{\includegraphics{REaifocActive-area.eps}} }}
\rule{9.3cm}{0pt} \makebox[0pt][l]{
\resizebox{!}{0.439\textwidth}{\includegraphics{REpoly1.eps}}...
...ox{!}{0.322\textwidth}{\includegraphics{REaifocPoly1.eps}} }}
\rule{9.3cm}{0pt}
\makebox[0pt][l]{
\resizebox{!}{0.439\textwidth}{\includegraphics{REcontact.eps...
...!}{0.322\textwidth}{\includegraphics{REaifocContact.eps}} }}
\rule{9.3cm}{0pt} \makebox[0pt][l]{
\resizebox{!}{0.439\textwidth}{\includegraphics{REmetal1.eps}...
...{!}{0.322\textwidth}{\includegraphics{REaifocMetal1.eps}} }}
\rule{9.3cm}{0pt}


  
Figure 8.4: Aerial images for best focus (zoomed): ACTIVE-AREA (upper-left), POLY1 (upper-right), CONTACT (lower-left), and METAL1 (lower-right).
\makebox[0pt][l]{
\resizebox{!}{0.439\textwidth}{\includegraphics{REframeActive...
...ics*[114mm,54mm][180mm,102mm]{REaifocActive-areaCut.eps}} }}
\rule{9.3cm}{0pt} \makebox[0pt][l]{
\resizebox{!}{0.439\textwidth}{\includegraphics{REframePoly.e...
...degraphics*[114mm,54mm][180mm,102mm]{REaifocPoly1Cut.eps}} }}
\rule{9.3cm}{0pt}
\makebox[0pt][l]{
\resizebox{!}{0.439\textwidth}{\includegraphics{REframeContac...
...raphics*[114mm,54mm][180mm,102mm]{REaifocContactCut.eps}} }}
\rule{9.3cm}{0pt} \makebox[0pt][l]{
\resizebox{!}{0.439\textwidth}{\includegraphics{REframeMetal....
...graphics*[114mm,54mm][180mm,102mm]{REaifocMetal1Cut.eps}} }}
\rule{9.3cm}{0pt}


  
Figure 8.5: Aerial images for a defocus of 1 $ \mu$m: ACTIVE-AREA (upper-left), POLY1 (upper-right), CONTACT (lower-left), and METAL1 (lower-right).
\makebox[0pt][l]{
\resizebox{!}{0.439\textwidth}{\includegraphics{REactive-area...
....322\textwidth}{\includegraphics{REaidefActive-area.eps}} }}
\rule{9.3cm}{0pt} \makebox[0pt][l]{
\resizebox{!}{0.439\textwidth}{\includegraphics{REpoly1.eps}}...
...ox{!}{0.322\textwidth}{\includegraphics{REaidefPoly1.eps}} }}
\rule{9.3cm}{0pt}
\makebox[0pt][l]{
\resizebox{!}{0.439\textwidth}{\includegraphics{REcontact.eps...
...!}{0.322\textwidth}{\includegraphics{REaidefContact.eps}} }}
\rule{9.3cm}{0pt} \makebox[0pt][l]{
\resizebox{!}{0.439\textwidth}{\includegraphics{REmetal1.eps}...
...{!}{0.322\textwidth}{\includegraphics{REaidefMetal1.eps}} }}
\rule{9.3cm}{0pt}


  
Figure 8.6: Aerial images for a defocus of 1 $ \mu$m (zoomed): ACTIVE-AREA (upper-left), POLY1 (upper-right), CONTACT (lower-left), and METAL1 (lower-right).
\makebox[0pt][l]{
\resizebox{!}{0.439\textwidth}{\includegraphics{REframeActive...
...ics*[114mm,54mm][180mm,102mm]{REaidefActive-areaCut.eps}} }}
\rule{9.3cm}{0pt} \makebox[0pt][l]{
\resizebox{!}{0.439\textwidth}{\includegraphics{REframePoly.e...
...degraphics*[114mm,54mm][180mm,102mm]{REaidefPoly1Cut.eps}} }}
\rule{9.3cm}{0pt}
\makebox[0pt][l]{
\resizebox{!}{0.439\textwidth}{\includegraphics{REframeContac...
...raphics*[114mm,54mm][180mm,102mm]{REaidefContactCut.eps}} }}
\rule{9.3cm}{0pt} \makebox[0pt][l]{
\resizebox{!}{0.439\textwidth}{\includegraphics{REframeMetal....
...graphics*[114mm,54mm][180mm,102mm]{REaidefMetal1Cut.eps}} }}
\rule{9.3cm}{0pt}


next up previous contents
Next: 8.1.2 Imaging Enhancement Techniques Up: 8.1 Aerial Image Simulation Previous: 8.1 Aerial Image Simulation
Heinrich Kirchauer, Institute for Microelectronics, TU Vienna
1998-04-17