List of Figures

• 2.1 Graph of the module dependencies in the SIESTA framework.
• 2.2 Graphical User Interface of the queue manager module with the available hosts and the queued jobs.
• 3.1 The example points of a Screening Analysis with three input parameters.
• 3.2 The example points of a Full Factorial design with three input parameters.
• 3.3 The example points of a Central Composite Circumscribed design with three input parameters.
• 3.4 Positions of the four design points in the subspace spanned by p1 and p2.
• 3.5 Structure of the Design of Experiments program with transformations.
• 3.6 Structure of the Response Surface Methodology program with transformations.
• 3.7 Integration of the statistical analysis tools into the framework.
• 3.8 Experiment file for the DoE.
• 3.9 Model file for the extraction of the drain current ( "analyze.mod").
• 3.10 Input deck for the MINIMOS-NT device simulator ( "mmnt.ipd").
• 4.1 Structure of a least-squares problem.
• 4.2 Transformation for the bound constraints.
• 4.3 Example of an MDL file.
• 4.4 Structure of a general nonlinear optimization problem with equality and inequality constraints.
• 4.5 Evaluation function linked to the optimizer executable.
• 4.6 Binding of external model functions.
• 4.7 Structure of the code for parallel execution.
• 4.8 Parallelized gradient evaluation and initialization file handling.
• 4.9 Triggering of checkpoints.
• 4.10 The experiment file describes the calibration task.
• 4.11 The submodel evaluates the fitted model function.
• 4.12 The module file describes the model analyzed in the calibration task.
• 4.13 Values for a2 and a3.
• 4.14 Values for a1.
• 4.15 The experiment file describes an optimization with nonlinear constraints.
• 4.16 The model file describes the model function.
• 4.17 Values for the independent parameters x and x.
• 4.18 Values for the target function f and the constraint constraint1.
• 4.19 GUI of the SIESTA optimization module.
• 4.20 Interactions between the optimizer and the framework. By means of stdin, stdout, and stderr redirection the optimization protocol is established.
• 5.1 Cross section of the analyzed Vertical Double-diffused Metal Oxide Semiconductor transistor.
• 5.2 Main steps for solving the optimization problem.
• 5.3 Structure of the optimization task using DoE and RSM.
• 5.4 Response surface of the target function.
• 5.5 Net-doping concentration (in $\ {\rm cm^{-3}}$) of the optimized VDMOS transistor.
• 5.6 Structure of the model evaluated in one optimization loop.
• 5.7 Experiment file for the device optimization with nonlinear constraints.
• 5.8 Module file describing the model evaluated during the optimization.
• 5.9 Module file describing the device generation.
• 5.10 Module file describing the device characterization.
• 5.11 Two dimensional analytical acceptor and donor doping profile of the optimized NMOS transistor.
• 5.12 Analytical acceptor and donor doping profiles of the optimized NMOS transistor.
• 5.13 Structure of the first part of the inverse modeling task.
• 5.14 Structure of the second part of the inverse modeling task.
• 5.15 Analytical doping profiles of the generated device.
• 5.16 Donor doping delivered by Tsuprem4.
• 5.17 Fitted analytical donor doping profile.
• 5.18 Id-Vd curve of the $0.18 \ {\rm\mu m}$ device for $V_g = 1 \ {\rm V}$ , $1.5 \ {\rm V}$, and $2 \ {\rm V}$.
• 5.19 Id-Vg curve of the $0.17 \ {\rm\mu m}$ device for $V_d = 0.05 \ {\rm V}$ and $1.5 \ {\rm V}$.
• 5.20 Id-Vd curve of the $0.25 \ {\rm\mu m}$ device for $V_g = 1 \ {\rm V}$ , $1.5 \ {\rm V}$, and $2 \ {\rm V}$.
• 5.21 Id-Vg curve of the $0.25 \ {\rm\mu m}$ device for $V_d = 0.05 \ {\rm V}$ and $1.5 \ {\rm V}$.
• 5.22 Id-Vd curve of the $0.5 \ {\rm\mu m}$ device for $V_g = 1 \ {\rm V}$ , $1.5 \ {\rm V}$, and $2 \ {\rm V}$.
• 5.23 Id-Vg curve of the $0.5 \ {\rm\mu m}$ device for $V_d = 0.05 \ {\rm V}$ and $1.5 \ {\rm V}$.
• 5.24 C/V curve of the $10 \ {\rm\mu m}$ device.
• 5.25 GUI of the SIESTA optimize module.
• A.1 Variable assignment, sections and inheritance in the Input Deck Programming Language.
• D.1 Command line options of the vdoe program.
• D.2 Syntax of the vdoe input deck.
• D.3 Example of a CCC design with two control parameters.
• E.1 Command line options of the vrsm program.
• E.2 Syntax of the vrsm input deck.
• E.3 Example of a Response Surface Methodology description.
• F.1 Command line options of the lmmin program.
• F.2 Possible Input Deck Programming Language settings of the lmmin program.
• G.1 Additional Input Deck Programming Language options of the mlmmin program.
• G.2 A example of an MDL file.
• H.1 Command line options of the donopt program.
• H.2 Possible Input Deck Programming Language settings of the donopt program.