3.2.3 FEM

The FEM file format is the native file format of the program package SAP (SMART ANALYSIS PACKAGE) [36,37,38,39,40,41,42]. SAP is a program package for interconnect simulation. It is capable of extracting capacities, resistances, and inductances of interconnect structures. Another application field of SAP is the thermal analysis of interconnect structures. The purpose of this I/O implementation is to integrate the SAP package with the WAFER-STATE-SERVER. Only the Reader interface is implemented using parts of the SAP I/O functionality that is integrated with the package.

A FEM file can only store one attribute. Hence, the SAP Reader is restricted to deliver only one attribute. This shortcoming could easily be solved if the Reader was extended in a way such that several FEM files -- each with another attribute -- are read.