8.2 Simulation of Thin Films

As already outlined in Section 4.2.4, anisotropy has to be taken into account when the dimensions of the analyzed device reach into the range of the grain size of the ferroelectric material. Since these are the first simulations which have been carried out in this field, a planar capacitor with a ferroelectric dielectric is analyzed. The angles of the axes of anisotropy are defined as shown in Fig. 8.5.

Figure 8.5: Definition of the angle $\alpha$ of the axis of anisotropy