4.1 Spray Pyrolysis Deposition

During the last several decades, coating technologies have garnered considerable attention, mainly due to their functional advantages over bulk materials, processing flexibility, and cost considerations [157]. Thin film coatings may be deposited using physical methods or chemical methods. The chemical methods can be split according to a gas phase deposition or a liquid phase deposition. These processes are summarized in Figure 4.1, where CVD and Atomic Layer Epitaxy (ALE) are the gas processes.

Figure 4.1: Summary of chemical thin film deposition technologies.


Spray pyrolysis, as can be seen in Figure 4.1, is a technique which uses a liquid source for thin film coating.


L. Filipovic: Topography Simulation of Novel Processing Techniques