4. Novel Deposition and Etch Techniques

In this section, some processing techniques which are not included in current state-of-the-art process simulators, but which are gaining more traction in the scientific community, are introduced. Spray pyrolysis deposition is an inexpensive tool for the deposition of crystalline powders [150], which can then be further annealed in order to grow nanowires for sensor and other applications. BiCS flash memory is an emerging technology, proposed by Toshiba as a low-cost memory solution, involving the etching of stacked Silicon and SiO$ _2$ films [206].


L. Filipovic: Topography Simulation of Novel Processing Techniques