Symmetrical Case:



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Symmetrical Case:

We assume that the virgin devices may be considered as symmetrical. For those devices holds. From the experimental data the trap density at can be calculated by

 

This relationship is derived in Appendix G. The factor can be obtained by a steady-state numerical calculation. Neglecting the second term in the brackets, which represents a correction due to the effect, expression 3.130 reduces to the one usually applied in literature [423][272][271]

 

 

The second term in the brackets in 3.130 can be approximated with the corresponding value in the channel. We further assume that the traps are uniformly distributed in the channel. Note that the trap density can vary in the source and drain junctions due to high dopant concentration or as a result of technological process. Three approaches to evaluate this parasitic term are presented in Appendix G. In the first method, the charge-pumping current is calculated by the transient numerical simulation assuming traps in the middle of the channel. In this case, only varies with because of the effect. In the second approach we calculate the dependence of the threshold voltage on by using the steady-state numerical simulation and approximate . In the third method, is calculated for two equivalent devices with different gate lengths ( and ). These devices can represent two devices laying close to each other on the same wafer. The difference between in these two devices may be directly used to estimate the second parasitic term in relationship 3.130 by , where is the effective channel length of the device considered for formula 3.130. This approach is equivalent to the first method, but it can be probably exploited in measurements. For this method to yield proper results in practice, the trap density distribution must be very close in both devices. Experimental work is necessary here.

In the following we evaluate expressions 3.130 and 3.131. The first example is shown in Figures 3.31 and 3.32. The dashed curve in Figure 3.32 is the assumed uniform trap distribution in the channel and both junctions in a virgin device. For this uniform distribution the charge-pumping characteristic is calculated numerically, Figure 3.31. Note that the drain and source are connected together. The trap distributions obtained by applying formulas 3.130 and 3.131 on the calculated data are shown in Figure 3.32 for the different parameter . Neglecting the second term due to the effect yields an overestimation of the exact (assumed) distribution (dotted-dashed curves). Accounting for the variable the recalculated curves become close to the assumed distribution (solid lines), giving a confirmation for formula 3.130. Note that the error due to neglecting the parasitic term increases with increasing channel length (in this example the gate length is ).

The second example is given in Figure 3.33. The dashed curve is an assumed nonuniform trap distribution within the drain junction in virgin device. We assume that the symmetrical trap distribution is at the source side, as well. Note that a lateral trap nonuniformity near and within the junctions can result from the technological process due to implantation damage or the presence of high dopant concentration near the interface [441]. For the assumed trap distribution, the is calculated numerically. In accounting for the variable the recalculated curve (solid lines) becomes close to the assumed nonuniform distribution, while neglecting this effect leads to a systematic overestimation of the extracted trap density (dotted-dashed curves). Note that in this example the critical concentration corresponds to three capture time constants (expression 3.128).

 

 



next up previous contents
Next: Non-symmetrical Case: Up: 3.5.2 Extraction of the Previous: 3.5.2 Extraction of the



Martin Stiftinger
Sat Oct 15 22:05:10 MET 1994