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4.4.4 Damage Accumulation
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4. Monte-Carlo Simulation with
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4.5.1 Damage Accumulation of
4.5 Special Features
Subsections
4.5.1 Damage Accumulation of Several Ion Implantation Steps
4.5.2 Molecular Ion Implantation
4.5.2.1 Simplified Molecular Method
4.5.2.2 Full Molecular Method
4.5.3 Point Response Interface
4.5.4 Multiple Implantations with Varying Rotation Angles
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4.4.4 Damage Accumulation
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4. Monte-Carlo Simulation with
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4.5.1 Damage Accumulation of
A. Hoessiger: Simulation of Ion Implantation for ULSI Technology
Previous: 4.4.4 Damage Accumulation
Up: 4. Monte-Carlo Simulation with
Next: 4.5.1 Damage Accumulation of
Previous: 4.4.4 Damage Accumulation
Up: 4. Monte-Carlo Simulation with
Next: 4.5.1 Damage Accumulation of