4.5.2 Simulation Tools

The simulation tools for TCAD application can be classified into five major categories: process simulation, device simulation, interconnect simulation, geometry manipulation, mesh generation, as well as visualization tools and graphical user interfaces (GUIs). The available simulation tools in the optimization framework SIESTA are listed in Figure 4.10. In this figure also the logical connections between the different simulation tools illustrated.

Figure 4.10: Available toolflow showing the variety of TCAD simulation tools provided at the Institute for Microlelectronics.

The following subsections will give a brief overview of the available simulation tools.


Stefan Holzer 2007-11-19