4.9 Discussion



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4.9 Discussion

Besides the device structure and geometry, the net doping is the only other input for solving Poisson's equation. By matching   the experimental capacitance measurements, the extracted profile is an accurate representation of the net dopant distribution in the device. In this section, different points that illustrate some of the method characteristics, limitations, and associated uncertainties are presented and discussed.




Martin Stiftinger
Tue Aug 1 19:07:20 MET DST 1995