8.2.3 Printing of a Contact Hole over Reflective Step

Figure 8.24: PAC concentration after exposure and developed resist profile for contact hole printing over a reflective a-silicon step for coherent illumination (left: best focus, right: 1 $\mu$ m defocus above).

$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...{0.5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REexposReflCohe.eps}}$	$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REexposReflCoheDef.eps}}$
$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...{0.5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REdevelReflCohe.eps}}$	$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REdevelReflCoheDef.eps}}$

Figure 8.25: PAC concentration after exposure and developed resist profile for contact hole printing over a reflective a-silicon step for circular illumination (left: best focus, right: 1 $\mu$ m defocus above).

$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...{0.5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REexposReflCirc.eps}}$	$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REexposReflCircDef.eps}}$
$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...{0.5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REdevelReflCirc.eps}}$	$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REdevelReflCircDef.eps}}$

Figure 8.26: PAC concentration after exposure and developed resist profile for contact hole printing over a reflective a-silicon step for quadrupole illumination (left: best focus, right: 1 $\mu$ m defocus above).

$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...{0.5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REexposReflQuad.eps}}$	$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REexposReflQuadDef.eps}}$
$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...{0.5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REdevelReflQuad.eps}}$	$\resizebox{0.45\textwidth}{!}{ \psfrag{xlab}{1.0 $\mu$ m} \psfrag{ylab}{\rotateb... ...5 $\mu$ m}} \psfrag{zlab}{0.7 $\mu$ m} \includegraphics{REdevelReflQuadDef.eps}}$