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#

E. Diffraction in Far Field
Approximation

If the optical wavelength is a linear function of the coordinates of the points
in the plane of the aperture and the plane of the projection, one can apply
the so called FRAUNHOFER Far Field Approximation. There are many examples for
such a case. E.g. the source and the projection planes are far away from the
aperture. Another possibility would be the use of lenses. In the following
section only the former situation (source and projection planes are in the far
field) is considered.

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R. Minixhofer: Integrating Technology Simulation
into the Semiconductor Manufacturing Environment