3.2.2 Mass Density

The values of the mass densities of the basic materials are well-known, and are used to model the values for alloy materials. A linear change between the values of basic materials is used.

$$\rho_{\mathrm{L}}^{\mathrm {AB}} = \left(1-x\right)\cdot \rho^{\mathrm {A}} + x\cdot \rho^{\mathrm {B}}$$ (3.54)

The parameter values used are summarized in Table 3.4.

Table 3.4: Parameter values for mass density

Material	$\rho$ [g/cm$^3$]	Reported Range	References
Si	2.33	2.238 - 2.239	[90,85,86]
Ge	5.327	5.3234- 5.3267	[90,85]
GaAs	5.32	5.307 - 5.36	[87,84,104]
AlAs	3.76	3.76	[84,104]
InAs	5.667	5.667	[88,84,73]
InP	4.81	4.79-4.81	[96,84,73]
GaP	4.138	4.13-4.14	[84,73]
SiO$_2$	2.203	2.2 - 2.207	[85,86]
Si$_3$N$_4$	3.1	3.1	[85,86]