Figure 9.10 and Figure 9.11 depict the
evolution the peak concentrations of the Gaussian profiles *N*_{3}, and
*N*_{4} and their
values during the inverse modeling
procedure. Figure 9.12 depicts the match vector which
represents the accuracy of simulated data compared to measured data in
percent. It shows the match which resulted from the initial profile,
from an intermediate profile, and from the final profile. One can see
from this figure that the optimizer was able to identify vertical
doping profiles which match the measurements considerably better than
the initial profile
did. compare the
transfer characteristics of the
device at a drain
voltage of 1.5V in linear, and logarithmic scale,
respectively. One can see that the inverse modeling procedure resulted
in a exceptional good fit, given the fact that only the vertical
distribution of the acceptor doping was considered and the lateral
profile of the donor doping remained unchanged.

1999-05-27