| IC | Integrated circuit |
| ENIAC | Electronic numerical integrator and computer |
| TSV | Through silicon via |
| FEOL | Front-end of line |
| BEOL | Back-end of line |
| CTE | Coefficient of themal expansion |
| PDE | Partial differential equation |
| FEM | Finite element method |
| BVP | Boundary value problem |
| ODE | Ordinary differential equation |
| IVP | Initial value problem |
| BDF | Back differentiation formula |
| CVD | Chemical vapor deposition |
| PVD | Physical vapor deposition |
| CMOS | Complementary metal-oxide-semiconductor |
| GA | Genetic algorithm |
| PECVD | Plasma enhanced chemical vapor deposition |
| VW | Volmer-Weber |