2.2.4 Sensors

Chemical sensors for liquids [34] and gases [35] were demonstrated recently. High temperature greatly widens the application field for gas sensors and also reduces the response times [36]. The temperature stability of GaN devices is therefore a distinguishable merit. Pressure sensors, sensitive to high and low pressures, require different techniques. For high pressure applications planar devices are used [37], while for low pressure applications membranes are required [38].

S. Vitanov: Simulation of High Electron Mobility Transistors