Chemical sensors for liquids [34] and
gases [35] were demonstrated recently. High temperature
greatly widens the application field for gas sensors and also reduces
the response times [36]. The temperature stability of GaN
devices is therefore a distinguishable merit. Pressure sensors,
sensitive to high and low pressures, require different techniques. For
high pressure applications planar devices are used
[37], while for low pressure applications membranes are required [38].
S. Vitanov: Simulation of High Electron Mobility Transistors
