3.2 Model Library

Here we give some examples of model equations we have implemented in PROMIS, namely those models which are currently supplied with the PROMIS Model Library.

These are the models:

Difn
uncoupled diffusion in the intrinsic regime or when only one dopant is under consideration
Difc
field coupled concentration dependent diffusion after Fair [Fai81]
Difscl
diffusivities from [Fai81] including static clustering of boron and arsenic
Difdcl
diffusivities from [Fai81] including dynamic clustering of arsenic [Tsa80], [Gue82]
Oeds
dual diffusion model [Hu83] using an analytical approximation for the point defect concentration
Oed
dual diffusion model [Hu83], coupled solution of point defect and dopant diffusion
Rta
pair diffusion model [Hei90] for boron, Fair's model [Fai81] for other dopants

• 3.2.1 Coupled/Uncoupled Diffusion (Models DIFC and DIFN)
  • Model Equations for Electric Field Coupled Diffusion (Model DIFC)
  • Simplifications for Uncoupled Diffusion (Model DIFN)
  • Model Parameters
• 3.2.2 High Concentration Effects (Models DIFSCL and DIFDCL)
  • Dynamic Clustering (Model DIFDCL)
  • Static Clustering (Model DIFSCL)
  • Model Parameters
• 3.2.3 Oxidation Enhanced/Retarded Diffusion (Models OEDS and OED)
  • Analytical Point Defect Model for OED/ORD (Model OEDS)
  • Coupled Point Defect and Impurity Diffusion Model for OED/ORD
    (Model OED)
• 3.2.4 Rapid Thermal Annealing (Model RTA)
  • Basic Assumptions
  • RTA Peculiarities
  • Model Parameters