- Define three lattice vectors , and . In the case of a cubic crystal, the lattice vectors are chosen along the edges of the crystallographic unit cell (unit cube).
- Identify the intercepting points , and between the plane and the lattice vectors, and express them in units of the lattice vectors , and .
- Calculate the reciprocal of the , and and choose the smallest three integer values that have a greatest common divisor of one.

Negative indices are denoted by a bar above their value or . If there is no interception between an axis and the plane, the Miller index is 0 (they intercept in infinity). Depending on the brackets used, their meaning can be further distinguished:

- round brackets denote a certain plane or the vector perpendicular to the plane
- curly braces stand for all planes that are equivalent to due to the symmetry of the crystal.
- these brackets mean a given direction in the crystall.
- angle brackets describe all directions that are equivalent to the direction .

means that the plane intersects the axis vectors at and at . Additionally, the direction vector is always perpendicular to the plane , for cubic crystal structures.

T. Windbacher: Engineering Gate Stacks for Field-Effect Transistors