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3. Physical Influence of Strain on the Semiconductor Properties

After an overview of the process side of strain in manufacturing an introduction into the physical description of strain in semiconductors will be given in the following chapter. At first, a general description of the strain and stress tensors in semiconductors is derived. Then, there will be a small introduction to crystall structures and band structures, due to the important properties which can be derived from the band structure, followed by an overview of methods to calculate the band structure. Finally a more detailed view on the k.p method is given.

Subsections

3.1 Strain
3.2 Stress
3.3 Stress-Strain Relation
3.4 Miller Index Notation
3.5 Strain and Bulk Band Structure
- 3.5.1 Deformation Potential Theory
- 3.5.2 The k.p Method

Next: 3.1 Strain Up: Dissertation T. Windbacher Previous: 2.5 Working Principle of

T. Windbacher: Engineering Gate Stacks for Field-Effect Transistors