List of Figures

• The Viennese Integrated System for Technology CAD Applications
• Simulator integration by wrapping
• Direct simulator integration
• Total simulator integration by splitting into functional modules
• Simulation flow with ``well-behaved'' FCTs
• Simulation flow with information bypassing
• Simulation flow with information bypassing and wafer-state maintenance
• The user's ideal view of TCAD data
• Conceptual TCAD framework architecture consisting of Task, Tool, and Data Levels
• Tool coupling without and with usage of an interchange format. Data paths between the process simulator PROMIS [Pich85], the device simulator MINIMOS [Thur90][Kosi94], the capacitance simulator VLSICAP [Stra86], and the graphical postprocessor POST (internal tool) are shown.
• Conceptual view of the client-server approach
• VISTA data level structure (L-Bdg. ... LISP-Binding, F-Bdg. ... FORTRAN-Binding)
• The logical PIF structure
• The VISTA software distribution mechanism
• Inheritance in VOOPS
• VISTA data level core diagram
• Local and network storage
• Examples of PAI networking capabilities
• Implementation of a basic layer node
• Example of a LISP internal data structure
• Example of a PIF binary file and basic layer data structure
• Layout of a PIF physical file with multiple logical files
• Example of an interface layer data structure
• Tasks of the PIF binary file manager
• Support for unstructured grids
• Structure of the VISTA high-level libraries
• The GRS class tree.
• Attribute object referencing a grid object. Note that only members referencing other objects are drawn. The attribute is contained in a linked list of attributes. The values of the attribute object are contained in an array object (in this case a floating point array object). The grid the attribute is defined on is also referenced by its spatial derivatives, which are stored as attribute objects too.
• Tensor product grid object. Only members of pointer type are shown. All rectangles with sharp corners represent simple allocated C arrays rather than GRS objects, drawn as rectangles with round corners. Both the origin and the base vectors are stored in allocated real arrays. In this case the origin vector has three values, hence the grid lies in three-dimensional space. There are three orthonormal base vectors, hence we have also have a grid with three topological dimensions spanning a three-dimensional cube. The tick values finally are stored in the grid axes real arrays.
• Point cloud grid object. Only members referencing other objects are shown. Since a point cloud grid is just a set of points, an unstructured point list object is used to represent the grid.
• Unstructured grid object. Only members referencing other objects are shown. Solid lines denote reference by pointer while dashed lines denote reference by index.
• Hierarchical unstructured grid object. Only members referencing other objects are shown. The Faces and Conn structures are simplified for clarity. Solid lines denote reference by pointer while dashed lines denote reference by index. An example element hierarchy branch is shown in the connectivity arrays.
• Correct and incorrect grid element hierarchies for point location. The left triangulation shows the result of a KIRKPATRICK grid hierarchy construction step by removing the center point M and retriangulating the resulting polygon. The newly generated triangles are shaded, and locating point P will successfully return the light shaded middle triangle. The right triangulation (as it may result from an oxidation simulation using a hierarchical triangular grid) however fails to locate point P, because despite the fact it is included in the thickly outlined parent triangle, its shaded children do not include point P.
• Coarsening the initial triangulation through point removal. Case (a) shows an initial triangulation consisting of 9 rectangles which is coarsened in four steps. Points with a degree of less than five (constant is chosen to be five) are marked for removal and shown encircled. Note that in case (b) boundary points lying on a straight line are selected.
• The resulting search-directed acyclic graph. Solid lines denote direct references. Dashed lines denote promotion of nodes. Since was chosen to be five, at most four nodes are referenced by inner nodes.
• Retriangulation of a star-shaped polygon. Starting from an arbitrary point, the angle enclosed by the following two edges is examined. Point is selected because angle is less than degrees. The process is repeated with the new polygon consisting of points until only three points (the final triangle) are left.
• Generating references from the newly generated to the removed triangles. A boundary scan for the new triangle 13 yields references to triangles 8, 1, 2 and 3. Since the star center point lies in triangle 14, this new triangle references all triangles contained in the initial star triangulation.
• Original boron doping on the triangular grid
• Interpolated boron doping on the tensor product grid
• Final net doping on the tensor product grid
• The material classification tree used by the MAT library
• Data flow in the VLSICAP standalone version
• Data flow in VISTA-VLSICAP
• Geometry of a four-conductor problem
• Example input data
• VLSICAP example edited with PED
• MESHCP grid
• Table of the calculated capacitances
• Geometry of the parasitic MOSFET
• Geometry with extracted -junction
• Grid generated by MESHCP
• Gate-Bulk capacitance versus gate voltage
• Potential distribution at gate voltage
• Potential distribution on vector product grid
• Simplified quarter-micron CMOS process flow
• Boron, phosphorus, and arsenic doping concentrations of a micron NMOS device
• UNFUG data flow
• Relation of VOOPS' template header and source files
• BNF syntax of VOOPS type expressions