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6 Acknowledgment
This research project is supported by
Austria Mikro Systeme International AG,
Unterpremstätten, Austria and Christian Doppler
Forschungsgesellschaft, Vienna, Austria.
The authors would like to thank SONY Corporation Atsugi Technology Center,
Atsugi, Japan, for providing the SEM pictures of the TiN films.
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W. Pyka, R. Martins, and S. Selberherr: Optimized Algorithms for Three-Dimensional Cellular Topography Simulation