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6 Acknowledgment

This research project is supported by Austria Mikro Systeme International AG, Unterpremstätten, Austria and Christian Doppler Forschungsgesellschaft, Vienna, Austria. The authors would like to thank SONY Corporation Atsugi Technology Center, Atsugi, Japan, for providing the SEM pictures of the TiN films.

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W. Pyka, R. Martins, and S. Selberherr: Optimized Algorithms for Three-Dimensional Cellular Topography Simulation