Contents

• Contents
• 1 Introduction
• 2 Scope
• 3 Topography Algorithms
  • 3.1 Isotropic Etching/Deposition
    • 3.1.1 Spherical Segments
    • 3.1.2 Linear Elements
    • 3.1.3 Benchmark Example
  • 3.2 Unidirectional Etching/Deposition
  • 3.3 Sputter Deposition
  • 3.4 Timings
• 4 Inclusion of Layout Information
• 5 Conclusion
• 6 Acknowledgment
• Bibliography

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