General Object-Oriented Solver

**
M. Radi,
E. Leitner, and
S. Selberherr
Institute for Microelectronics, TU Vienna
Gusshausstrasse 27-29, A-1040 Vienna, Austria
http://www.iue.tuwien.ac.at
**

To accurately simulate modern semiconductor process steps, a
simulation tool must include a variety of physical models and
numerical methods. Increasingly complex physical formulations are
required to account for effects that were not important in simulating
previous generations of technology. Thus flexibility in definition of
models as well as numerical solving methods is highly desirable. An
object-oriented approach has been applied to implementing a dimension
independent solver which uses an analytical input interface in the
manner of Math-Cad, Mathematica, Matlab but highly optimized for
numerical calculations of partial differential equations for complex
simulation domains. It is equipped with a numerical solver, that
supports direct and iterative solution methods, as well as an adaptive
hierarchical grid adaptation algorithm which can be controlled by the
analytical input language. To show the abilities of AMIGOS several
examples in different dimensions are demonstrated.

- 1. Introduction
- 2. AMIGOS
- 3. Input & Control Interface
- 4. AMI - Analytical Model Interface
- 5. Optimizer
- 6. ESA - Equation System Analyzer
- 7. Solving Methods
- 8. Grid & Element Manager
- 9. Examples
- Bibliography