4.1.1 Implementation Details

The Monte-Carlo Ion Implantation simulator developed at the Institute for Microelectronics [56,57,58,59,60] is an implementation of this simulation methodology. It is fully integrated with the WAFER-STATE-SERVER and was re-implemented in C++ based on a previously developed FORTRAN implementation which was not WAFER-STATE conforming. The new implementation differs from the previous version in the following major points.

The long simulation times of ion-implantation simulations and the comparably huge number of point location operations that are necessary during the simulation run, justify the usage of the oct-tree data structures for this application. Although the pre-processing time for building the oct-tree is much larger as with the alternative available jump-and-walk algorithm the total execution time is reduced.