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4.3.1 Charge States

For the computation of the built-in potential (4.5) it is required that the charge states of quantities in the surrounding material segments are defined. Again PROMIS-NT provides a set of predefined materials (Table 4.2) for which the charge states of the default quantities Table 4.1 are properly defined.


Table 4.2: PROMIS-NT segment materials
material MDL name
silicon Si
germanium Ge
silicon-germanium SiGe
gallium arsenide GaAs
silicon dioxide SiO2
Nitride Si3N4
resist Resist
aluminum oxide Al2O3
poly crystalline silicon Poly

The explicit computation of the built-in potential in other materials can be ensured by adding charge state definitions for the required quantities as described in Section 4.5.3.3.



Robert Mlekus
1999-11-14