Surface scattering is modeled by the following empirical expression [160]

The function depending on the surface distance describes a smooth transition between the surface and bulk mobility [174,175]. The parameter describes a critical length.

The pressing forces and in (3.118) are equal to the magnitude of the normal field strength at the interface if the carriers are attracted by the interface, otherwise zero.

3.4.3.2

The total mobility is expressed by a

2001-02-28