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2.1.4 Pseudo Process Models

Some processing steps do not require a simulation based on physical principles because they are not relevant for an investigation. Such steps are modeled by extremely simple models. Some of them work similar to drawing programs (PROST [101], MAKEDEVICE [5]) although they are controlled by input decks instead of a pointing device. Nevertheless, they are extremely useful for applications like optimization tasks or device research. Simulation tools like DIOS or TSUPREM which are mainly focused on thermal processing steps also offer these kinds of models for topography manipulations.

Rudi Strasser